Syntheses of η 1 ‐Alkyl‐ η 3 ‐Allyl‐ η 5 ‐Cyclopentadienyl Cobalt(III) Complexes and Their Use in Low‐temperature Atomic Layer Deposition of Cobalt‐Containing Thin Films

Author:

Lu Ke1ORCID,Zhu Jiahao1,Wang Jialiang1,Wa Qingbo1,Guo Zheng1,Xiong Wei1,Gao Yuan2,Lei Renbo1,Cheng Bichu3,Wang Xinwei1ORCID

Affiliation:

1. School of Advanced Materials Shenzhen Graduate School Peking University Shenzhen 518055 P. R. China

2. State Key Laboratory of Nuclear Physics and Technology School of Physics Peking University Beijing 100871 P. R. China

3. School of Science Harbin Institute of Technology, Shenzhen Shenzhen 518055 P. R. China

Funder

National Natural Science Foundation of China

Basic and Applied Basic Research Foundation of Guangdong Province

Shenzhen Fundamental Research Program

Shenzhen Peacock Plan

State Key Laboratory of Nuclear Physics and Technology, Peking University

Publisher

Wiley

Subject

General Chemistry,Catalysis,Organic Chemistry

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