Author:
Schwarz G.,Trapp M.,Schimko R.,Butzke G.,Rogge K.
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference15 articles.
1. The Influence of the Amorphous Phase on Ion Distributions and Annealing Behavior of Group III and Group V Ions Implanted into Silicon
2. Proc. II. Conf. Ion Implantation, Garmisch-Partenkirchen 1971 (p. 47).
3. and , Proc. Conf. Ion Implantation, Reading 1970 (p. 102).
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