Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
7 articles.
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1. Computer simulations of surface analysis using ion beams;Progress in Surface Science;2006-01
2. The simulation of two-beam high-dose ion implantation into solid targets;Technical Physics;2001-11
3. Simulation of two-beam ion implantation in the multilayer and multicomponent targets;Vacuum;2001-08
4. High dose arsenic implantation of silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-03
5. Sputtering effects in high dose Bi+ implantation of GaAs;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1990-03