Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
63 articles.
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1. The chemo-mechanical effect of cutting fluid on material removal in diamond scribing of silicon;Applied Physics Letters;2017-07-03
2. Mechanical Properties of Silicon Microstructures;Handbook of Silicon Based MEMS Materials and Technologies;2015
3. Mechanical properties of silicon microstructures;Handbook of Silicon Based MEMS Materials and Technologies;2015
4. Dislocations;Materials Science and Technology;2013-02-15
5. Mechanical Properties of Silicon Microstructures;Handbook of Silicon Based MEMS Materials and Technologies;2010