Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
4 articles.
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1. Materials Processing;Ion Beams in Materials Processing and Analysis;2012
2. Nonlinear distribution model of ions implanted at high doses;Journal of Engineering Physics and Thermophysics;1998-03
3. A closed form analytic model for separation by implantation of oxygen oxide growth using a joined‐Gaussian approximation;Journal of Applied Physics;1993-02
4. Computer simulation of high fluence oxygen profiles in silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1990-03