Step-Scanning WSR Section Topography for Indirect (Point Defect) Characterization of Dislocation-Free Si Wafers
Author:
Publisher
Wiley
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
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1. X-ray topography studies of microdefects in silicon;Philosophical Transactions of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences;1999-10
2. White Synchrotron Radiation Tomography of fs-Excimer Laser Ablation/Bulk Damage in a (100) Si Wafer;physica status solidi (a);1998-01
3. Laue-Transmission Integrated Reflectivities for ‘Thin’ Crystal Diamond, Si and Ge X-Ray Monochromators;physica status solidi (a);1997-02
4. White synchrotron X-radiation-section topography of high energy density ns-pulsed (Nd:YAG) ablation damage in Si(100) wafers;Applied Surface Science;1996-04
5. White synchrotron X-radiation-section topography of high energy density ns-pulsed (Nd:YAG) ablation damage in Si(100) wafers;Laser Ablation;1996
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