Author:
Reichardt H.-U.,Grosch D.,Siebers R.
Subject
Surfaces, Coatings and Films,Condensed Matter Physics
Reference11 articles.
1. Henning , J. Turbomolekularpumpen
2. Schmierung von Turbomolekularpumpen;Reichardt;Schmierungstechnik,1989
3. microbalance for measuring evaporation rates in vacuum;Freundlich;Vacuum,1964
4. Vacuum pump fluids;O'Hanion;J. Vac. Sci. Technol. A,1984