An investigation of the vacuum UV spectra of inductivity coupled RF plasmas excited in inert gases as a function of some of the operating parameters
-
Published:1980-04
Issue:4
Volume:18
Page:1233-1246
-
ISSN:0360-6376
-
Container-title:Journal of Polymer Science: Polymer Chemistry Edition
-
language:
-
Short-container-title:J. Polym. Sci. Polym. Chem. Ed.
Author:
Clark D. T.,Dilks A.
Cited by
36 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Second-harmonic currents in rf-biased, inductively coupled discharges;Plasma Sources Science and Technology;2023-06-01
2. Noble Gas Plasmas;Nonthermal Plasmas for Materials Processing;2022-07-15
3. Introduction;Nonthermal Plasmas for Materials Processing;2022-07-15
4. Polymer Surface Functionalization;Nonthermal Plasmas for Materials Processing;2022-07-15
5. In situ measurement of electron emission yield at silicon dioxide surfaces exposed to argon plasmas;Plasma Sources Science and Technology;2021-02-01