Surface science insight note: Charge compensation and charge correction in X‐ray photoelectron spectroscopy

Abstract

Strategies to deal with sample charging effects on X‐ray photoelectron spectroscopy (XPS) spectra are presented. These strategies combine charge compensation (or lack of) via a flow of electrons and an electrical connection (or lack of) of samples to the ground. Practical examples involving samples with a range of different electrical properties, sample structure/composition and sensitivity to X‐rays, illustrate the correlation between sample properties, measurement strategies, and the resulting XPS data. The most appropriate measurement strategy for a particular sample is also recommended. We highlight the crucial importance of appropriate XPS data acquisition to obtain a correct data interpretation.