1. Department of Physics, Zhejiang Province Key Laboratory of Quantum Technology and Devices, Interdisciplinary Center for Quantum Information, and State Key Lab of Silicon Materials Zhejiang University Hangzhou Zhejiang 310027 China
2. School of Physics & Optoelectronic Engineering Shandong University of Technology Zibo Shandong 255000 China
3. Collaborative Innovation Centre of Advanced Microstructures Nanjing University Nanjing Jiangsu 210093 China