Growth and characterization of highly c-axis textured SrTiO3 thin films directly grown on Si(001) substrates by ion beam sputter deposition
Author:
Publisher
Wiley
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
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1. Dielectric Properties of Au/SrTiO3/p-Si Structure Obtained by RF Magnetron Sputtering in a Wide Frequency Range;Silicon;2021-03-20
2. Electro‐optical performances of nanostructured SrTiO x films: The effect of plasma power, Ar/O 2 ratio and annealing;International Journal of Applied Ceramic Technology;2021-02-08
3. Negative capacitance phenomena in Au/SrTiO3/p-Si heterojunction structure;Journal of Materials Science: Materials in Electronics;2020-04-21
4. Effect of O2/Ar flow ratio and post-deposition annealing on the structural, optical and electrical characteristics of SrTiO3 thin films deposited by RF sputtering at room temperature;Thin Solid Films;2015-09
5. Surface roughness analysis of SiO2 for PECVD, PVD and IBD on different substrates;Applied Nanoscience;2015-03-22
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