The effect of oxidation temperature on the nano crystalline structure of ZrO2 films deposited on silicon and glass substrates
Author:
Publisher
Wiley
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Reference28 articles.
1. Modification of zirconium oxide film microstructure during post-deposition annealing
2. Modification of the optical and structural properties of dielectric ZrO2films by ion‐assisted deposition
3. Experimental and theoretical determination of the electronic structure and optical properties of three phases ofZrO2
4. Effect of maltose for the crystallization of tetragonal zirconia
5. Thermodynamic stability of binary oxides in contact with silicon
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