Effect of oxidation on intrinsic residual stress in amorphous silicon carbide films-Reference-Cited by-同舟云学术

Effect of oxidation on intrinsic residual stress in amorphous silicon carbide films

Published:2018-10-15 Issue:5 Volume:107 Page:1654-1661
ISSN:1552-4973
Container-title:Journal of Biomedical Materials Research Part B: Applied Biomaterials
language:en
Short-container-title:J. Biomed. Mater. Res.

Author:

Deku Felix¹^ORCID,Mohammed Shakil²,Joshi‐Imre Alexandra¹,Maeng Jimin¹,Danda Vindhya¹,Gardner Timothy J.³,Cogan Stuart F.¹

Affiliation:

1. Department of BioengineeringUniversity of Texas at Dallas Richardson Texas

2. Department of Materials Science and EngineeringUniversity of Texas at Dallas Richardson Texas

3. Department of Biology and Department of Biomedical EngineeringBoston University Boston Massachusetts

Funder

National Institutes of Health

Publisher

Wiley

Subject

Biomedical Engineering,Biomaterials

Link

Reference43 articles.

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