Design and Optimization for AlGaN‐Based Deep Ultraviolet Fabry–Perot Laser Diodes

Author:

Yang Jianyu1,Tian Kangkai2,Chu Chunshuang2,Zhang Yonghui1,Jiang Ke3,Sun Xiaojuan3,Li Dabing3,Sun Xiao Wei4,Zhang Zi‐Hui12ORCID

Affiliation:

1. State Key Laboratory of Reliability and Intelligence of Electrical Equipment Hebei University of Technology Key Laboratory of Electronic Materials and Devices of Tianjin School of Electronics and Information Engineering Hebei University of Technology 5340 Xiping Road, Beichen Tianjin 300401 China

2. School of Integrated Circuits Guangdong University of Technology Guangzhou 510006 China

3. State Key Laboratory of Luminescence and Applications Changchun Institute of Optics Fine Mechanics and Physics Chinese Academy of Sciences Changchun 130033 China

4. Institute of Nanoscience and Applications and Department of Electrical and Electronic Engineering Southern University of Science and Technology Shenzhen 518055 China

Abstract

AbstractIn this work, AlGaN‐based deep ultraviolet Fabry–Perot (FP) laser diodes (DUV LDs) are designed by using Technology Computer Aided Design (TCAD) simulations, and the physical models for DUV LDs are also developed. It is found that the optical absorption in the p‐region significantly increases the optical loss and reduces the laser power. Hence, properly increasing the Al composition for the p‐waveguide (p‐WG) and the p‐type cladding layer (CL) helps shift the optical field to the n‐region, which is effective in decreasing the free‐carrier absorption in the p‐region. However, if not properly optimized, this will decrease the optical confinement factor, which will decrease the stimulated recombination rate between electrons and holes. Then, the electron leakage becomes significant. The studies show that the p‐electron blocking layer (p‐EBL) will not strongly affect the optical field profiles. Hence, the Al composition in the p‐EBL has more freedom for electrical optimization. Therefore, a compromised design is required so that both the optical and the electrical properties can be improved.

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China

Publisher

Wiley

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