On the evaluation of damping in MEMS in the slip-flow regime-Reference-Cited by-同舟云学术

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On the evaluation of damping in MEMS in the slip-flow regime

Published:2006-04-27 Issue:10 Volume:68 Page:1031-1051
ISSN:0029-5981
Container-title:International Journal for Numerical Methods in Engineering
language:en
Short-container-title:Int. J. Numer. Meth. Engng.

Author:

Frangi A.,Spinola G.,Vigna B.

Funder

EU ‘Design for Micro & Nano Manufacture (PATENT-DfMM)’ Network of Excellence

Publisher

Wiley

Subject

Applied Mathematics,General Engineering,Numerical Analysis

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/nme.1749/fullpdf

Reference23 articles.

1. Micro Flows: Fundamentals and Simulation

2. Rarefaction effects on shear driven oscillatory gas flows: a direct simulation Monte Carlo study in the entire Knudsen regime;Park;Physics of Fluids,2004

3. Multipole BEM for the evaluation of damping forces on MEMS;Frangi;Computational Mechanics,2005

4. A qualocation enhanced approach for the Dirichlet problem of exterior Stokes flow;Frangi;Engineering Analysis with Boundary Elements,2005

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1. Efficient simulation of rarefied gas flow past a particle: A boundary element method for the linearized G13 equations;Physics of Fluids;2022-06

2. Mode Coupling and Parametric Resonance in Electrostatically Actuated Micromirrors;IEEE Transactions on Industrial Electronics;2018-07

3. The oscillating and electrostatic characteristics of microelectromechanical system cantilever structure analyzed based on the air gap domain;Journal of Low Frequency Noise, Vibration and Active Control;2018-04-08

4. Micromirrors and Parametric Resonance;Mechanics of Microsystems;2018-02-12

5. Damping in Microsystems;Mechanics of Microsystems;2018-02-12

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