High‐Resolution Study of Changes in Morphology and Chemistry of Cylindrical PS‐ <i>b</i> ‐PMMA Block Copolymer Nanomasks during Mask Development-Reference-Cited by-同舟云学术

High‐Resolution Study of Changes in Morphology and Chemistry of Cylindrical PS‐ b ‐PMMA Block Copolymer Nanomasks during Mask Development

Published:2022-08-17 Issue:26 Volume:9 Page:2200962
ISSN:2196-7350
Container-title:Advanced Materials Interfaces
language:en
Short-container-title:Adv Materials Inter

Author:

Bürger Julius¹²³,Venugopal Harikrishnan¹²³,Kool Daniel¹²³^ORCID,de los Arcos Teresa³⁴,Gonzalez Orive Alejandro⁵,Grundmeier Guido³⁴^ORCID,Brassat Katharina¹²³^ORCID,Lindner Jörg K.N.¹²³^ORCID

Affiliation:

1. Nanostructuring, Nanoanalysis and Photonic Materials Group Department of Physics Paderborn University 33098 Paderborn Germany

2. Center for Optoelectronics and Photonics Paderborn (CeOPP) 33098 Paderborn Germany

3. Institute of Lightweight Design with Hybrid Materials (ILH) 33098 Paderborn Germany

4. Technical and Macromolecular Chemistry Dept. of Chemistry Paderborn University 33098 Paderborn Germany

5. Institute of Materials and Nanotechnology Universidad de La Laguna Santa Cruz de Tenerife 38206 Spain

Publisher

Wiley

Subject

General Medicine

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/admi.202200962

Reference57 articles.

1. 50th Anniversary Perspective: Block Polymers—Pure Potential

2. Directed Block Copolymer Thin Film Self-Assembly: Emerging Trends in Nanopattern Fabrication

3. Directing the self-assembly of block copolymers

4. Advanced scanning probe lithography

5. Maskless lithography

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