1. Digital Transformation R&D Dept. Korea Institute of Industrial Technology Ansan‐si Gyeong‐gi‐do 15588 Korea
2. Dept. of Micro/Nano Systems College of Engineering Korea University 145, Anam‐ro, Seongbuk‐gu Seoul 02841 Korea
3. EM Development Team ChemE Inc. 199, Techno 2‐ro, Yuseong‐gu Daejeon 34025 Republic of Korea