Time of flight elastic recoil detection analysis with toroidal electrostatic analyzer for ultra shallow dopant profiling-Reference-Cited by-同舟云学术

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Time of flight elastic recoil detection analysis with toroidal electrostatic analyzer for ultra shallow dopant profiling

Published:2012-01-30 Issue:6 Volume:44 Page:732-735
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Abo Satoshi¹,Horiuchi Hidemasa¹,Wakaya Fujio¹,Battistig Gabor,Lohner Tivadar,Takai Mikio¹

Affiliation:

1. Center for Quantum Science and Technology under Extreme Conditions; Osaka University; 1-3 Machikaneyama; Toyonaka; Osaka; 560-8531; Japan

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference6 articles.

1. International Technology Roadmap for Semiconductors 2009 Editions http://www.itrs.net

2. Development of enhanced depth-resolution technique for shallow dopant profiles

3. Characterization of dopant profiles produced by ultra-shallow As implantation and spike annealing using medium energy ion scattering

4. Dopant profiling of ultra shallow As implanted in Si with and without spike annealing using medium energy ion scattering

5. Elastic recoil detection for medium‐energy ion scattering

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Analysis technique for ultra shallow junction using medium energy ion scattering time-of-flight elastic recoil detection analysis;Surface and Interface Analysis;2014-06-11

2. Study of boron detection limit using the in-air PIGE set-up at LAMFI-USP;AIP Conference Proceedings;2014

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