Temperature Distributions Across the Plasma Layer of Planar Low Pressure Microwave Plasmas — A Comparative Investigation by Optical Emission Spectroscopy-Reference-Cited by-同舟云学术

Temperature Distributions Across the Plasma Layer of Planar Low Pressure Microwave Plasmas — A Comparative Investigation by Optical Emission Spectroscopy

Published:1994 Issue:4 Volume:34 Page:575-586
ISSN:0863-1042
Container-title:Contributions to Plasma Physics
language:en
Short-container-title:Contrib. Plasma.Phys.

Author:

Röpcke J.,Ohl A.

Publisher

Wiley

Subject

Condensed Matter Physics

Reference26 articles.

1. Diplomarbeit, Uni Stuttgart 1991.

2. Spektroskopische Methoden der Plasmaphysik in “Ergebnisse der Plasmaphysik und Gaselektronik”, Akademie-Verlag, Berlin 1970.

3. Atomic and Laser Spectroscopy, Clarendon Press, Oxford 1988.

4. , The Theory of Atomic Spectra, Cambridge University Press, Cambridge 1959.

5. Optical Resolution of the Lamb Shift in Atomic Hydrogen by Laser Saturation Spectroscopy

Cited by 18 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Spatially Resolved Optical Emission and Modeling Studies of Microwave-Activated Hydrogen Plasmas Operating under Conditions Relevant for Diamond Chemical Vapor Deposition;The Journal of Physical Chemistry A;2018-09-25

2. Atomic and molecular hydrogen gas temperatures in a low-pressure helicon plasma;Plasma Sources Science and Technology;2015-06-22

3. Gas temperature determination from rotational lines in non-equilibrium plasmas: a review;Plasma Sources Science and Technology;2014-04-07

4. Ultrafast Deposition of Diamond by Plasma-Enhanced CVD;Comprehensive Hard Materials;2014

5. Gas temperature measurements in a microwave plasma by optical emission spectroscopy under single-wall carbon nanotube growth conditions;Journal of Physics D: Applied Physics;2008-04-07