Ultrashallow depth profiling using SIMS and ion scattering spectroscopy
Author:
Publisher
Wiley
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/sia.2597/fullpdf
Reference16 articles.
1. A new secondary ion mass spectrometry technique for III‐V semiconductor compounds using the molecular ions CsM+
2. On the use of CsX+ cluster ions for major element depth profiling in secondary ion mass spectrometry
3. Basic requirements for quantitative SIMS analysis using cesium bombardment and detection of MCs+ secondary ions
4. Angular dependence of ion yields and cesium surface coverage in Cs+ attachment secondary ion mass spectrometry (CsAMS)
5. Quantitative analysis of nitrogen in oxynitrides on silicon by MCs[sup +] secondary ion mass spectrometry?
Cited by 16 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. High-resolution Rutherford backscattering spectrometry with an optimised solid-state detector;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2021-01
2. Large-Area, Nanometer-Scale Discrete Doping of Semiconductors via Block Copolymer Self-Assembly;Advanced Materials Interfaces;2015-09-22
3. Secondary Ion Mass Spectrometry;Practical Materials Characterization;2014
4. Advanced SIMS quantification in the first few nm of B, P and As ultrashallow implants;Surface and Interface Analysis;2010-06-08
5. Grazing incidence x-ray fluorescence and secondary ion mass spectrometry combined approach for the characterization of ultrashallow arsenic distribution in silicon;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2010-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3