1. Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering Beijing Institute of Technology Beijing 100081 P. R. China
2. Yangtze Delta Region Academy of Beijing Institute of Technology Jiaxing 314019 P. R. China
3. Lab of Precision Measurement and Intelligent Sensing Technology, College of Control Science and Engineering China University of Petroleum Qingdao Shandong 266580 P. R. China
4. Beijing National Laboratory for Condensed Matter Physics Institute of Physics, Chinese Academy of Sciences P.O. Box 603 Beijing 100190 P. R. China