Affiliation:
1. Department of Mechanical Engineering National University of Singapore 9 Engineering Drive 1 Singapore 117575 Singapore
2. Shanghai Industrial µTechnology Research Institute 235 Chengbei Rd Shanghai 201800 China
3. Department of Electrical & Computer Engineering National University of Singapore 4 Engineering Drive 3 Singapore 117583 Singapore
Abstract
AbstractMode‐division‐multiplexing (MDM) recently attracted much interest due to its ability to enhance the capacity for optical information communication. To meet growing data transmission demands and enable flexible on‐chip mode manipulation, programmable optical mode converter switches are essential. This work introduces a micro‐electromechanical‐system (MEMS)‐enabled programmable arbitrary order mode switch, capitalizing on the benefits of MEMS technology such as low power consumption, robust modulation capabilities, and seamless large‐scale integration. Employing newly developed MEMS‐tunable mode converter (MTMC) units, the system achieves high conversion efficiencies from the fundamental mode to arbitrary higher‐order modes and supports programmable power distribution among different modes by cascading multiple MTMCs. As a proof‐of‐concept, a programmable TE0–TE0/1/2 mode switch operates in the 3.64 to 3.71 µm wavelength range, achieving maximum crosstalk values of –9.56 and –9.88 dB for TE0 to TE1 and TE0 to TE2 mode conversion, respectively, and a remarkably low power consumption of 67 pW. Furthermore, a programmable mode multiplexer is developed by simultaneously actuating two MEMS actuators to modulate phase matching conditions, enabling arbitrary power splitting ratios among these modes. The demonstrated scalability and flexibility of the proposed system highlight its potential as a foundational component for MDM systems.