Affiliation:
1. Friedrich Schiller University Jena Institute of Applied Physics Abbe Center of Photonics Albert‐Einstein‐Straße 15 07745 Jena Germany
2. Fraunhofer Institute for Applied Optics and Precision Engineering IOF Center of Excellence in Photonics Albert‐Einstein‐Straße 7 07745 Jena Germany
Abstract
AbstractIn this work, picosecond laser inscription of segmented waveguides in crystalline silicon based on a deterministic single‐pulse modification process is demonstrated. Pulses of 43 ps duration at 1.55 wavelength are used to transversely inscribe periodic structures with a pulse‐to‐pulse pitch of ≈2 . Infrared shadowgraphy images and Raman spectroscopy measurements indicate that the modifications exhibit a spherical shape. Characterization of waveguide performance at 1.55 for various pulse energies and periods is carried out. Direct comparison with numerical simulations confirms the presence of graded index waveguides, encompassing a micrometer core size and a maximum refractive index change of . This short‐pulse inscription approach can pave the way for 3D integrated photonic devices in the bulk of silicon.
Funder
Bundesministerium für Bildung und Forschung
Max Planck School of Photonics