Wafer‐Scale Manufacturing of Near‐Infrared Metalenses

Author:

Moon Seong‐Won1ORCID,Kim Joohoon1ORCID,Park Chanwoong2,Kim Wonjoong2,Yang Younghwan1,Kim Jaekyung1,Lee Seokho1,Choi Minseok1,Sung Hansang2,Park Jaein2,Song Hyoin2,Lee Heon23ORCID,Rho Junsuk1456ORCID

Affiliation:

1. Department of Mechanical Engineering Pohang University of Science and Technology (POSTECH) Pohang 37673 Republic of Korea

2. Department of Materials Science and Engineering Korea University Seoul 02841 Republic of Korea

3. ZERC Seoul 02841 Republic of Korea

4. Department of Chemical Engineering Pohang University of Science and Technology (POSTECH) Pohang 37673 Republic of Korea

5. POSCO‐POSTECH‐RIST Convergence Research Center for Flat optics and Metaphotonics Pohang 37673 Republic of Korea

6. National Institute of Nanomaterials Technology (NINT) Pohang 37673 Republic of Korea

Abstract

AbstractMetalenses have revolutionized optical technologies with their superior ability to manipulate light and the potential to replace conventional, bulky optical components. However, their commercialization is hindered by limitations in conventional manufacturing techniques, such as small patterning areas, low throughput, and high cost. In this study, two methods are introduced for scalable and wafer‐scale manufacturing of metalenses operating in the near‐infrared region, aimed at overcoming the abovementioned challenges. The first type of metalens is polarization‐independent and constructed using hydrogenated amorphous silicon cylindrical structures fabricated through direct photolithography. This metalens has a diameter of 1 cm and numerical aperture (NA) of 0.53. The focusing efficiency is confirmed at a 940 nm wavelength, and the focal spot profile approaches the diffraction limit. The second metalens is polarization‐dependent and fabricated using silicon nanoparticle‐embedded‐resin rectangular structures through a cost‐effective nanoimprinting method. This process can produce metalenses with a diameter of 5 mm and an NA of 0.53. Both types of metalenses demonstrate high‐resolution capabilities when imaging a 1951 USAF resolution test target and bioimaging. This research offers innovative pathways for the mass production and large‐scale fabrication of metalenses. It is believed that the work will accelerate the industrialization of metalenses, fostering further advances in optical technology.

Funder

National Research Foundation of Korea

Korea Evaluation Institute of Industrial Technology

Publisher

Wiley

Subject

Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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