1. Department of Electronic Engineering Tsinghua University Beijing 100084 P. R. China
2. Frontier Science Center for Quantum Information Beijing 100084 P. R. China
3. Beijing National Research Center for Information Science and Technology Beijing 100084 P. R. China
4. Tsinghua International Center for Nano‐Optoelectronics Tsinghua University Beijing 100084 P. R. China
5. Institute of Semiconductors Chinese Academy of Sciences Beijing 100083 P. R. China
6. College of Integrated Circuits and Optoelectronic Chips Shenzhen Technology University Shenzhen Guangdong 518118 P. R. China