Optimization of substrate pretreatment and deposition conditions for epitaxial growth of β-FeSi2film on Si(100)
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Published:2013-11-11
Issue:12
Volume:10
Page:1699-1703
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ISSN:1862-6351
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Container-title:physica status solidi (c)
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language:en
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Short-container-title:Phys. Status Solidi C
Author:
Yamaguchi Kenji,Hamamoto Satoshi,Hojou Kiichi
Subject
Condensed Matter Physics