Author:
Horade Mitsuhiro,Sugiyama Susumu
Subject
Electrical and Electronic Engineering
Reference8 articles.
1. Synchrotron radiation micromachining of polymers to produce high aspect ratio microparts;Zhang;Japanese Journal of Applied Physics,1996
2. Plain-pattern to cross-section transfer (PCT) technique for deep X-ray lithography and applications;Sugiyama;Journal of Micromechanical Microengineering,2004
3. A novel fabrication process of 3-D microstructures by double exposure in deep x-ray lithography (D2XRL);Matsuzuka;Journal of Micromechanics and Microengineering,2005
4. 3-Dimensional microfabrication of polytetrafluoroethylene by using synchrotron radiation;Horade;Proceedings of the 13th International Display Workshops,2006
5. 3-D PTFE microstructure fabricated using synchrotoron radiation etching;Horade;Microsystem Technologies,2008
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