Single‐Step‐Lithography Micro‐Stepper Based on Frictional Contact and Chiral Metamaterial
Author:
Affiliation:
1. Institut FEMTO‐ST CNRS UMR 6174 University Bourgogne Franche‐Comté Besançon 25000 France
2. National Key Laboratory of Science and Technology on Advanced Composites in Special Environments Harbin Institute of Technology Harbin 150001 P. R. China
Funder
National Natural Science Foundation of China
China Scholarship Council
Publisher
Wiley
Subject
Biomaterials,Biotechnology,General Materials Science,General Chemistry
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/smll.202202128
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