Electrothermally-actuated RF-MEMS suspended parallel switch

Author:

Girbau David,Pradell Lluís,Lázaro Antonio,Nebot Àlvar

Publisher

Wiley

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. , , et al. A DC to 100 GHz high performance ohmic shunt switch, In: IEEE MTT-S International Microwave Symposium, Fort Worth, TX, Vol. 3, June 2004, pp. 1931–1934.

2. A Low-Voltage Lateral MEMS Switch With High RF Performance

3. Low-loss lateral micromachined switches for high frequency applications

4. , , and , In-plane electrostatically-actuated RF MEMS switch suspended on a low-resistivity substrate, In: Proceedings of the 36th European Microwave Conference, September, 2006, pp. 1731–1734.

5. , , et al. MetalMUMPs Design Handbook, Rev. 1.0. http://www.memsrus.com/nc-mumps.metal.html.

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