Surface cavities produced by high-dose nitrogen ion implantation into silicon

Author:

Rudolphi M.,Markwitz A.,Baumann H.

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference26 articles.

1. . Gmelin Handbook of Inorganic and Organometallic Chemistry, Si Suppl. B 5c, Silicon Nitride in Microelectronics and Solar Cells. Springer: Berlin, 1991.

2. , , . Gmelin Handbook of Inorganic and Organometallic Chemistry, Si Suppl. B 5e, Non-Electronic Applications of Silicon Nitride. Springer: Berlin, 1994.

3. . In Silicon Nitride Ceramics—Scientific and Technological Advances, Vol. 287, , , , (eds). Materials Research Society Symposium Proceedings, Pittsburgh, PA, USA, 1993; 3.

4. . In Materials Science and Technology, , (eds). Wiley-VCH: Weinheim, 1994; 518.

5. A silicon nitride reference material—A testing program of ESIS TC6

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