Impact of Plasma Electron Flux on Plasma Damage-Free Sputtering of Ultrathin Tin-Doped Indium Oxide Contact Layer onp-GaN for InGaN/GaN Light-Emitting Diodes

Author:

Son Kwang Jeong1,Kim Tae Kyoung1,Cha Yu-Jung1,Oh Seung Kyu12,You Shin-Jae3,Ryou Jae-Hyun24,Kwak Joon Seop1ORCID

Affiliation:

1. Department of Printed Electronics Engineering; Sunchon National University; Jeonnam 57922 Korea

2. Department of Mechanical Engineering and Texas Center for Superconductivity at UH (TcSUH); University of Houston; Houston TX 77204-4006 USA

3. Department of Physics; Chungnam National University; Daejeon 34134 Korea

4. Materials Science and Engineering Program; University of Houston; Houston TX 77204 USA

Funder

National Research Foundation of Korea

Korea Evaluation Institute of Industrial Technology

Ministry of Trade, Industry and Energy

Publisher

Wiley

Subject

General Physics and Astronomy,General Engineering,Biochemistry, Genetics and Molecular Biology (miscellaneous),General Materials Science,General Chemical Engineering,Medicine (miscellaneous)

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