1. WPI Advanced Institute for Materials Research; Tohoku University; Sendai 980-8577 Japan
2. MEMSCORE Cooperation; Sendai 981-3206 Japan
3. Micro System Integration Center; Tohoku University; Sendai 980-0845 Japan
4. Fraunhofer Institute for Electronic Nano Systems; Chemnitz 09126 Germany
5. State Key Laboratory of Metal Matrix Composites; School of Materials Science and Engineering; Shanghai Jiao Tong University; Shanghai 200030 P. R China
6. CREST; JST; 4-1-8 Honcho Kawaguchi Saitama 332-0012 Japan