1. Light Technology Institute (LTI)Karlsruhe Institute of Technology Engesserstrasse 13 76131 Karlsruhe Germany
2. InnovationLab Speyerer Strasse 4 69115 Heidelberg Germany
3. Institute of Microstructure Technology (IMT)Karlsruhe Institute of Technology Hermann‐von‐Helmholtz‐Platz 1 76344 Eggenstein‐Leopoldshafen Germany
4. Kirchhoff Institute for Physics and Centre for Advanced MaterialsHeidelberg University Im Neuenheimer Feld 227 69120 Heidelberg Germany
5. Integrated Centre for Applied Physics and Photonic MaterialsCentre for Advancing Electronics Dresden (cfaed)Technical University of Dresden Nöthnitzer Straße 61 01187 Dresden Germany