Impurity engineering for germanium-doped Czochralski silicon wafer used for ultra large scale integrated circuit
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Published:2009-03
Issue:3
Volume:6
Page:625-632
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ISSN:1610-1634
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Container-title:physica status solidi (c)
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language:en
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Short-container-title:phys. stat. sol. (c)
Author:
Chen Jiahe,Yang Deren
Subject
Condensed Matter Physics
Cited by
15 articles.
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