MOVPE growth of high quality AlN layers and effects of Si doping
Author:
Publisher
Wiley
Subject
Condensed Matter Physics
Reference12 articles.
1. An aluminium nitride light-emitting diode with a wavelength of 210 nanometres
2. Reliability of AlGaN-based deep UV LEDs on sapphire
3. GaN/AlN-based quantum-well infrared photodetector for 1.55 μm
4. An Oxygen Doped Nucleation Layer for the Growth of High Optical Quality GaN on Sapphire
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1. Optimization of Growth Temperature and V/III Ratio toward High-Quality Si-Doped Aluminum Nitride Thin Films on Sapphire;Crystal Growth & Design;2024-09-12
2. Growth and characterization of PALE Si-doped AlN on sapphire substrate by MOVPE;Materials Science in Semiconductor Processing;2022-05
3. Bipolar pulsed reactive magnetron sputtering of epitaxial AlN- films on Si(111) utilizing a technology suitable for 8″ substrates;Surface and Coatings Technology;2022-01
4. Silicon induced defect reduction in AlN template layers for epitaxial lateral overgrowth;Journal of Crystal Growth;2017-03
5. Low Dislocation Densities of Nitride-Based Light-Emitting Diodes with a Preflow of NH3Source before Growth of AlN Buffer Layer;Japanese Journal of Applied Physics;2013-01-01
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