CBr4 as precursor for VPE growth of cubic silicon carbide
Author:
Publisher
Wiley
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Reference26 articles.
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Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Formation of (113) texture in fcc nitride thin films and its influence on the film properties;Thin Solid Films;2013-01
2. The Influence of C3H8 and CBr4 on Structural and Morphological Properties of 3C-SiC Layers;Materials Science Forum;2012-01
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