1. Semiconductor Industry Association, International Technology Roadmap for Semiconductors (2003 edn), SEMATECH: Austin, TX, 2003; Table 117a, p. 10, Metrology Section. Also available at http://public.itrs.net/Files/2003ITRS/Metrology2003.pdf.
2. Seeing the forest for the trees: a new approach to CD control
3. U.S. Census Bureau, Semiconductors, Printed Circuit Boards, Other Electronic Components (2003), U.S. Census Bureau: Washington DC; Table 2, p. 2, From MA334Q: Current Industrial Reports. Also available at http://www.census.gov/industry/1/ma334q03.pdf. Quoted data is for microprocessors having an internal data bus of 32 bits or more shipped in 2003.
4. Simulation study of repeatability and bias in the CD-SEM
5. Effect of bias variation on total uncertainty of CD measurements