Affiliation:
1. Department of Microsystems Engineering; University of Freiburg; Georges-Köhler-Allee 102 D-79110 Freiburg Germany
2. Karlsruhe Institute of Technology; Institute for Applied Materials-Materials Process Technology; Hermann-von Helmholtz-Platz 1 D-76344 Eggenstein-Leopoldshafen Germany
Funder
state of Baden-W�rttemberg, Ministerium f�r Wissenschaft, Forschung und Kunst
Subject
Materials Chemistry,Polymers and Plastics,Surfaces, Coatings and Films,General Chemistry
Cited by
5 articles.
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