Ion energy distribution in a radio frequency sheath of plasma with Kappa electron velocity distribution
Author:
Affiliation:
1. Institute of Plasma Physics Chinese Academy of Sciences Hefei China
2. Center for Magnetic Fusion Theory Chinese Academy of Sciences Hefei China
3. Advanced Energy Research Center Shenzhen University Shenzhen China
Funder
National Natural Science Foundation of China
Publisher
Wiley
Subject
Condensed Matter Physics
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/ctpp.202000108
Reference27 articles.
1. Ion energy distributions in rf sheaths; review, analysis and simulation
2. Radio frequency sheaths in an oblique magnetic field
3. Ion energy-angle distribution functions at the plasma-material interface in oblique magnetic fields
4. Modeling of the sheath and the energy distribution of ions bombarding rf-biased substrates in high density plasma reactors and comparison to experimental measurements
5. Multiple ion dynamics model for the collisionless rf sheaths and the ion energy distributions at rf-biased electrodes in fluorocarbon plasmas
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1. The effect of the electron κ-distribution on the dust particle charging in the radio-frequency thermal-sheaths;Physica Scripta;2024-07-22
2. Effective interaction potentials and the scattering cross sections of the Lorentzian dense semiclassical plasma particles;Physics Letters A;2022-09
3. Dust particle charging process in a radio frequency sheath of plasma containing kappa distribution electrons;Journal of Plasma Physics;2022-07-25
4. Numerical investigation of a radio frequency sheath with supra-thermal electrons in the presence of the magnetic field;Physica Scripta;2021-08-06
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