Characterization of Al2O3Thin Films Fabricated at Low Temperature via Atomic Layer Deposition on PEN Substrates-Reference-Cited by-同舟云学术

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Characterization of Al2O3Thin Films Fabricated at Low Temperature via Atomic Layer Deposition on PEN Substrates

Published:2014-02-21 Issue:4-5-6 Volume:20 Page:118-124
ISSN:0948-1907
Container-title:Chemical Vapor Deposition
language:en
Short-container-title:Chem. Vap. Deposition

Author:

Choi Kyung-Hyun¹,Ali Kamran¹,Kim Chang Young²,Muhammad Nauman Malik³

Affiliation:

1. Department of Mechatronics Engineering; Jeju National University; Jeju 690-756 (Korea)

2. Research Institute for Basic Sciences and Department of Physics; Jeju National University; Ara 1 Dong Jeju 690-756 (Korea)

3. Department of Mechanical engineering; Yildirim Beyazit University; Ankara (Turkey)

Publisher

Wiley

Subject

Process Chemistry and Technology,Surfaces and Interfaces,General Chemistry

Reference61 articles.

1. Oxide Electronics by Spatial Atomic Layer Deposition

2. An atomic layer deposition process for moving flexible substrates

3. Atomic Layer Deposition of Aluminum Oxide Films for Carbon Nanotube Network Transistor Passivation

4. Effects of ozone as an oxygen source on the properties of the Al2O3 thin films prepared by atomic layer deposition

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1. Nanolaminate‐Induced Mechanically and Environmentally Robust Al₂O₃/TiO₂ Thin Film Encapsulation by Low‐Temperature Atomic Layer Deposition: Toward Flexible and Wearable OLEDs;Advanced Materials Technologies;2024-06-11

2. Functionalization methods of carbon fibers – an overview;Polimery;2023-06-27

3. Properties of Al2O3 Thin Films Grown by PE-ALD at Low Temperature Using H2O and O2 Plasma Oxidants;Coatings;2021-10-19

4. Preparation of non-stoichiometric Al2O3 film with broadband antireflective by magnetron sputtering;Chemical Physics Letters;2021-02

5. Zirconium Oxide based memristors fabrication via Electrohydrodynamic Printing;2020 IEEE 11th International Conference on Mechanical and Intelligent Manufacturing Technologies (ICMIMT);2020-01

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