Polymer Viscoelasticity and Residual Stress Effects on Nanoimprint Lithography
Author:
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference32 articles.
1. Fabrication of 5nm linewidth and 14nm pitch features by nanoimprint lithography
2. Polymer Imprint Lithography with Molecular-Scale Resolution
3. Dewetting of thin polymer films
4. Dewetting Modes of Thin Metallic Films: Nucleation of Holes and Spinodal Dewetting
5. Defect analysis in thermal nanoimprint lithography
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