Fluorine- and siloxane-containing polymers for supercritical carbon dioxide lithography
Author:
Publisher
Wiley
Subject
Polymers and Plastics,Materials Chemistry,Organic Chemistry
Reference14 articles.
1. High-Resolution Patterning of Molecular Glasses Using Supercritical Carbon Dioxide
2. Supercritical CO2 Processing for Submicron Imaging of Fluoropolymers
3. Positive-Tone Photoresist Process for Supercritical Carbon Dioxide Development
4. Alicyclic photoresists for CO2-based next-generation microlithography: A tribute to James E. McGrath
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3. Demixing pressures of hydroxy-terminated poly(dimethylsiloxane)–carbon dioxide binary mixtures at 313.2K, 323.2K and 333.2K;The Journal of Supercritical Fluids;2014-08
4. Synthesis, characterization, and aqueous properties of new amphiphilic copolymer with fluorocarbon groups;Colloid and Polymer Science;2013-08-02
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