Accelerating the development of phase‐change random access memory with in‐fab plasma profiling time‐of‐flight mass spectrometry-Reference-Cited by-同舟云学术

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Accelerating the development of phase‐change random access memory with in‐fab plasma profiling time‐of‐flight mass spectrometry

Published:2020-06-15 Issue:12 Volume:52 Page:895-899
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf Interface Anal

Author:

Nolot Emmanuel¹^ORCID,Mazel Yann¹,Barnes Jean‐Paul¹,Sabbione Chiara¹,Navarro Gabriele¹,Tempez Agnes²,Legendre Sébastien²

Affiliation:

1. Univ. Grenoble Alpes CEA, LETI, F‐38000 Grenoble France

2. Department of Elemental Analysis HORIBA France SAS Paris France

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/sia.6823

Reference18 articles.

1. PasottiM CarissimiM AuricchioC et al.A 32KB 18ns random access time embedded PCM with enhanced program throughput for automotive and smart power applications ESSCIRC 2017‐43rd IEEE European Solid State Circuits Conference Leuven 2017 pp. 320–323 https://doi.org/10.1109/ESSCIRC.2017.8094590

2. A 32-KB ePCM for Real-Time Data Processing in Automotive and Smart Power Applications

3. ChengHY HsuTH RaouxS et al.A high performance phase change memory with fast switching speed and high temperature retention by engineering the GexSbyTez phase change material 2011 International Electron Devices Meeting Washington DC 2011 pp. 3.4.1–3.4.4 https://doi.org/10.1109/IEDM.2011.6131481

4. NavarroG CouéM KiouseloglouA et al.Trade‐off between SET and data retention performance thanks to innovative materials for phase‐change memory 2013 IEEE international Electron Devices Meeting Washington DC 2013 pp. 21.5.1–21.5.4. https://doi.org/10.1109/IEDM.2013.6724678

5. A map for phase-change materials

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1. Germanium, antimony, tellurium, their binary and ternary alloys and the impact of nitrogen: An X-ray photoelectron study;Applied Surface Science;2021-01

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