Low-Temperature Growth of Germanium Quantum Dots on Silicon Oxide by Inductively Coupled Plasma Chemical Vapor Deposition
Author:
Publisher
Wiley
Subject
Process Chemistry and Technology,Surfaces and Interfaces,General Chemistry
Reference20 articles.
1. Nano on nano
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1. Nanotechnology: Plasma-Based;Encyclopedia of Plasma Technology;2016-12-12
2. Plasma–surface interactions at nanoscales: a combinatorial theoretical, process diagnostics and surface microanalysis approach;Journal of Physics D: Applied Physics;2014-05-14
3. Quantum confinement in Si and Ge nanostructures: Theory and experiment;Applied Physics Reviews;2014-03
4. Plasma nanoscience: from nano-solids in plasmas to nano-plasmas in solids;Advances in Physics;2013-04
5. Plasma Synthesis of Quantum Dots;Nanoscience and Nanotechnology Letters;2013-03-01
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