Author:
Gleizes A. N.,Vahlas C.,Sovar M.-M.,Samélor D.,Lafont M.-C.
Subject
Process Chemistry and Technology,Surfaces and Interfaces,General Chemistry
Reference59 articles.
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2. Deposition and Properties of Aluminum Oxide Obtained by Pyrolytic Decomposition of an Aluminum Alkoxide
3. Aluminum oxide thin films prepared by chemical vapor deposition from aluminum 2‐ethylhexanoate
4. Properties of alumina films prepared by metal-organic chemical vapour deposition at atmospheric pressure in the presence of small amounts of water
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