13.1:Invited Paper: Excimer-Laser Annealing: Microstructure Evolution and a Novel Characterization Technique
Author:
Affiliation:
1. Coherent LaserSystems GmbH & Co. KG; Goettingen Germany
Publisher
Wiley
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/j.2168-0159.2014.tb00041.x/fullpdf
Reference9 articles.
1. “Optimization of low-temperature poly-Si TFT-LCDs and a large-scale production line for large glass substrates”;Yoneda;J. Soc. Info. Display,2001
2. “Ultraviolet-laser-induced periodic surface structures”;Driel;Phys. Rev. B,1989
3. “Laser-induced periodic surface structure. II. Experiments on Ge, Si, Al, and brass”;Young;Phys. Rev. B,1983
4. “Surface roughness effects in laser crystallized polycrystalline silicon”;McCulloch;Appl. Phys. Lett.,1995
5. “Capillary waves in pulsed excimer laser crystallized amorphous silicon”;Fork;Appl. Phys. Let.,1996
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