1. Institute of Semiconductor Science and Technology South China Normal University Foshan 528225 P. R. China
2. Guangdong Province Key Lab of Chip and Integration Technology Guangzhou 510631 P. R. China
3. Guangdong Provincial Key Laboratory of Sustainable Biomimetic Materials and Green Energy, Department of Materials Science and Engineering Southern University of Science and Technology Shenzhen 518055 P. R. China
4. Information Technology Research Institute Shenzhen Institute of Information Technology Shenzhen 518055 P. R. China
5. SKKU Advanced Institute of Nano Technology Sungkyunkwan University Suwon 16419 South Korea