Dynamic Response and Swift Recovery of Filament Heater‐Integrated Low‐Power Transparent CNT Gas Sensor

Author:

Chae Myoungsu12,Lee Doowon13,Kim Hee‐Dong1ORCID

Affiliation:

1. Department of Semiconductor Systems Engineering Convergence Engineering for Intelligent Drone and Institute of Semiconductor and System IC Sejong University 209, Neungdong‐ro, Gwangjin‐gu Seoul 05006 South Korea

2. Institute of Industrial Science University of Tokyo 4‐6‐1 Komaba, Meguro City Tokyo 153–8505 Japan

3. IHP GmbH—Leibniz Institute for Innovative Microelectronics Im Technologiepark 25 15236 Frankfurt(Oder) Germany

Abstract

AbstractDesigning a transparent carbon nanotube (CNT) gas sensor for nitrogen dioxide (NO2) detection at room temperature (RT), which is unaffected by humidity, is a critical challenge in various technologies. To solve this issue, a filament‐based memristor heater (MH) embedded low‐power CNT gas sensor is proposed to address humidity‐related issues, and dynamic response with a low power consumption of 6.15 µW and swift recovery of <1 ms/30.8 µW is successfully demonstrated, without any serious effects on humidity. This study reveals that the MH can effectively heat the surface of the active region due to the joule heating effect, which improves the absorption and desorption of the target gases and mitigates the influence on the humidity, which is in a response that is below 7.5%. As a result, it is believed that the proposed MH‐embedded transparent CNT gas sensors can address the humidity issues and slow response/recovery with ultralow‐power consumption and high‐accuracy gas sensing characteristics.

Funder

National Research Foundation of Korea

Publisher

Wiley

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