1. E. T. Zellers, K. D. Wise, K. Najafi, D. Aslam, R. B. Brown, Q. Y. Cai, J. Driscoll, M. Flynn, J. Giachino, R. Gordenker, M. D. Hsieh, C. T.-C. Nguyen, P. Bergstrom, J. Drelich, C. Friedrich, E. Gamble, M. Kaviany, C. J. Lu, A. Matzger, M. Oborny, S. Pang, J. Potkay, R. Sacks, W.-C. Tian, W. Steinecker, J. Whiting, and Q. Zhong, Technical Digest of the IEEE Conference on Technologies for Homeland Security (Boston, 2002), p. 92.
2. Micromachined Particle Filter With Low Power Dissipation
3. New fluid filter structure in silicon fabricated using a self‐aligning technique
4. Fabrication of porous membrane filter from p-type silicon