Hybrid EUV Resists with Mixed Organic Shells: A Simple Preparation Method
Author:
Affiliation:
1. Advanced Research Center for Nanolithography Science Park 106 1098XG Amsterdam The Netherlands
2. Paul Scherrer Institute 5232 Villigen Switzerland
Funder
Seventh Framework Programme
Publisher
Wiley
Subject
Inorganic Chemistry
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/ejic.201900745
Reference29 articles.
1. Resist Materials for Extreme Ultraviolet Lithography: Toward Low-Cost Single-Digit-Nanometer Patterning
2. Extreme ultraviolet resist materials for sub-7 nm patterning
3. Absorption coefficient of metal-containing photoresists in the extreme ultraviolet
4. Dynamic absorption coefficients of CAR and non-CAR resists at EUV
Cited by 23 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Lithographic resists as amazing compact imaging systems – A review;Micro and Nano Engineering;2024-09
2. Recent Advances in Metal-Oxide-Based Photoresists for EUV Lithography;Micromachines;2024-08-31
3. Metal Oxocluster-Based Organic–Inorganic Hybrid Materials: From Design Principles to Applications;Chemistry of Materials;2024-08-14
4. Heterometallic Ti-Zr oxo nanocluster photoresists for advanced lithography;Science China Materials;2024-08-06
5. Additive-Assisted Forming High-Quality Thin Films of Sn–Oxo Cluster for Nanopatterning;ACS Applied Materials & Interfaces;2024-07-24
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3